Title:
薄膜太陽電池の製造装置およびその制御装置
Document Type and Number:
Japanese Patent JP6638388
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a manufacturing method of a thin film solar cell which is contributed to improvement of quality of the thin film solar cell, and a control device therefor.SOLUTION: The control device is used for a manufacturing device for a thin film solar cell 100 capable of manufacturing the thin film solar cell 100 including a non-photographable line 150 of a scribe line 130 that cannot be imaged by being covered with a thin film 120, and a photographable line 140, and comprising a tool capable of removing the thin film 120, scan means capable of scanning the tool, a stage capable of supporting the thin film solar cell 100 and an imaging apparatus capable of imaging the thin film solar cell 100. The control device includes a control part which executes exposure processing for controlling the scan means in order to scan the tool in a first direction D1 that is a direction along the photographable line 140, in such a manner that the non-photographable line 150 is exposed, acquires image information of the thin film solar cell 100 captured by the imaging apparatus after the execution from the imaging apparatus, and measures a distance between the photographable line 140 and the non-photographable line 150 on the basis of the information.SELECTED DRAWING: Figure 6
Inventors:
Mitsuru Yamada
Nakano Tadanobu
Mihoichi Shinji
Nakano Tadanobu
Mihoichi Shinji
Application Number:
JP2015255280A
Publication Date:
January 29, 2020
Filing Date:
December 25, 2015
Export Citation:
Assignee:
Samsung Diamond Industry Co., Ltd.
International Classes:
H02S50/10; H01L31/046
Domestic Patent References:
| JP2015126206A | ||||
| JP2011096882A | ||||
| JP2014192357A | ||||
| JP2001168068A | ||||
| JP2005191167A |
Foreign References:
| US20110198322 | ||||
| KR1020100092111A |
Attorney, Agent or Firm:
Koji Fukui