Title:
THIN-FILM WINDOW AND DEVICE FOR PROPAGATING SYNCHROTRON RADIATION BEAM
Document Type and Number:
Japanese Patent JP2002040198
Kind Code:
A
Abstract:
To provide a thin-film window that enables easy replacement of a thin film.
A window frame has a first face shaped along a first imaginary face. A through-hole, with its one end opening inside the first face, is made in the window frame. An O-ring is located on the first face, in such a manner as to surround the opening of the through-hole. A thin film is laid out in such a manner as to imitate the first face. An intermediate member has a second face that conforms to the first face. The O-ring and the thin film are sandwiched between the first and second faces. A pressing member presses the intermediate member against the first face of the window frame.
Inventors:
HIROSE SAYUMI
Application Number:
JP2000222559A
Publication Date:
February 06, 2002
Filing Date:
July 24, 2000
Export Citation:
Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
G21K5/00; G03F7/20; H01L21/027; H05H13/04; (IPC1-7): G21K5/00; G03F7/20; H01L21/027; H05H13/04
Attorney, Agent or Firm:
Keishiro Takahashi (2 outside)