Title:
THIN SUBSTRATE CONVEYING DEVICE
Document Type and Number:
Japanese Patent JPH11300663
Kind Code:
A
Abstract:
To attain miniaturization by lengthening the conveying stroke of a robot hand, and reducing the turning radius.
A conveying device has cassettes 1, 2 for storing boards W, a robot 3 for conveying the substrate W, and at least one handling device 4A, 4B, 4C, 4D (4) for machining the substrate W. The robot 3 is composed of a vertical turning arm body 11 vertically turning on a machine base 12, and a horizontal turning arm body 14 having two sets of arms horizontally turning on a moving machine base 15. The vertical turning arm body 11 moved a hand almost parallel into the vicinity of the cassettes 1, 2 or the treating device 4, and the horizontal turning arm body 15 moves this band into and out of the cassettes 1, 2 or the handling device 4.
Inventors:
KIMATA KAZUO
KATO KATSUHIKO
KATO KATSUHIKO
Application Number:
JP11568398A
Publication Date:
November 02, 1999
Filing Date:
April 24, 1998
Export Citation:
Assignee:
MECS CORP
International Classes:
B65G49/07; H01L21/677; B25J9/00; H01L21/687; (IPC1-7): B25J9/00; H01L21/68
Attorney, Agent or Firm:
Akio Iida (1 person outside)