Title:
THREE-DIMENSIONAL SHAPE MEASURING DEVICE AND REFERENCE SURFACE POSITION ADJUSTMENT METHOD FOR THE SAME
Document Type and Number:
Japanese Patent JP2023114982
Kind Code:
A
Abstract:
To provide a three-dimensional shape measuring device that can match a measured optical path length and a reference optical path length with each other with high accuracy at low cost regardless of the temperature of an installation environment, and a reference surface position adjustment method for the same.SOLUTION: A three-dimensional shape measuring device comprises: a light source unit that emits measuring light being white light; an interference unit that divides part of the measuring light emitted by the light source unit as reference light, emits the measuring light to a surface to be measured and emits the reference light to a reference surface, and generates interference light between the measuring light returning from the surface to be measured and the reference light returning from the reference surface; a holder that accommodates the interference unit and the reference surface, the holder formed of a material that is thermally deformed reversibly according to a change in temperature and changing a reference optical path length that is the optical path length of the reference light between the interference unit and the reference surface according to the change in temperature; and a temperature adjustment unit that, when the optical path length between the interference unit and the surface to be measured is a measured optical path length, adjusts the temperature of the holder to be a target temperature at which the reference optical path length matches the measured optical path length.SELECTED DRAWING: Figure 5
Inventors:
KAWADA YOSHIYUKI
MORIYAMA KATSUFUMI
MORII HIDEKI
MORIYAMA KATSUFUMI
MORII HIDEKI
Application Number:
JP2023006106A
Publication Date:
August 18, 2023
Filing Date:
January 18, 2023
Export Citation:
Assignee:
TOKYO SEIMITSU CO LTD
International Classes:
G01B11/24; G01B9/02055
Attorney, Agent or Firm:
Kenzo Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura
Kazuki Ohara
Kiyoshi Matsumura
Constitutional Matsuura