To propose a precision tilt table device with a clamp mechanism for a positioned table.

The table 6 of the precision tilt table device 1 is kept in a clamped state by a spring force of a clamp actuator 20. At the time of positioning, the clamp actuator 20 is driven to drive a clamp force release mechanism consisting of a piezoelectric element and the like, thereby releasing the clamp of the table 6. In this state, the table 6 is oscillated vertically around a main shaft 4 by a positioning actuator 10 with an eccentric cam 12, thereby positioning the table 6 at a prescribed tilt position. After the positioning, the drive of the clamp force release mechanism of the clamp actuator 20 is released. As a result, a state where the positioned table 6 is clamped at the position is formed.