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Title:
【発明の名称】自動ドレッシング装置
Document Type and Number:
Japanese Patent JP2610484
Kind Code:
B2
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Inventors:
Katsuo Honda
Inamura Mago
Application Number:
JP12929988A
Publication Date:
May 14, 1997
Filing Date:
May 26, 1988
Export Citation:
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Assignee:
Tokyo Seimitsu Co., Ltd.
International Classes:
B24B53/00; B24B53/08; B28D1/22; B28D5/00; B28D5/02; H01L21/02; (IPC1-7): B24B53/00; B28D1/22; H01L21/02



 
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