Title:
【発明の名称】X線マスク用バックエッチング装置
Document Type and Number:
Japanese Patent JP2802438
Kind Code:
B2
Inventors:
Shigehisa Oki
Toshiyuki Horiuchi
Toshiyuki Horiuchi
Application Number:
JP15015689A
Publication Date:
September 24, 1998
Filing Date:
June 12, 1989
Export Citation:
Assignee:
Nippon Telegraph and Telephone Corporation
International Classes:
C23F1/00; C23F1/08; G03F1/68; G03F1/80; H01L21/027; H01L21/30; H01L21/306; (IPC1-7): H01L21/027; H01L21/306
Domestic Patent References:
| JP6389238A | ||||
| JP645443U |
Attorney, Agent or Firm:
Michio Takayama (1 outside)