Title:
【発明の名称】荷電粒子ビームモニタ
Document Type and Number:
Japanese Patent JP2863587
Kind Code:
B2
Inventors:
TORIKOSHI MASAMI
Application Number:
JP5555490A
Publication Date:
March 03, 1999
Filing Date:
March 06, 1990
Export Citation:
Assignee:
MITSUBISHI DENKI KK
International Classes:
G01T1/29; G01T1/18; G01T5/12; H01J47/06; H05H7/00; (IPC1-7): G01T1/18; G01T1/29; H01J47/06
Domestic Patent References:
| JP3163392A |
Attorney, Agent or Firm:
Kenichi Hayase