Title:
【発明の名称】塗布装置
Document Type and Number:
Japanese Patent JP2592673
Kind Code:
B2
Inventors:
MORYAMA MASASHI
Application Number:
JP2201589A
Publication Date:
March 19, 1997
Filing Date:
January 31, 1989
Export Citation:
Assignee:
TOKYO ELECTRON LTD
International Classes:
B05C11/08; H01L21/027; H01L21/30; (IPC1-7): B05C11/08; H01L21/027