Title:
【発明の名称】除振台の制御装置
Document Type and Number:
Japanese Patent JP2860623
Kind Code:
B2
Inventors:
WAKUI SHINJI
Application Number:
JP35866292A
Publication Date:
February 24, 1999
Filing Date:
December 28, 1992
Export Citation:
Assignee:
KYANON KK
International Classes:
F16F15/02; G03F7/20; G05D19/02; H01L21/027; H01L21/30; H01L21/68; (IPC1-7): H01L21/027; F16F15/02; G05D19/02; H01L21/68
Domestic Patent References:
| JP5121294A | ||||
| JP5250041A |
Attorney, Agent or Firm:
Tetsuya Ito (1 outside)