Title:
【発明の名称】ドライプロセス装置
Document Type and Number:
Japanese Patent JP2790878
Kind Code:
B2
Inventors:
KINOSHITA HARUHISA
MATSUMOTO OSAMU
SAKUMA HARUNOBU
MATSUMOTO OSAMU
SAKUMA HARUNOBU
Application Number:
JP29869489A
Publication Date:
August 27, 1998
Filing Date:
November 15, 1989
Export Citation:
Assignee:
KINOSHITA HARUHISA
KOKUSAI DENKI KK
KOKUSAI DENKI KK
International Classes:
C23C14/35; C23C16/50; C23F4/00; (IPC1-7): C23F4/00; C23C14/35; C23C16/50
Domestic Patent References:
| JP6130036A | ||||
| JP63155546A | ||||
| JP6223987A | ||||
| JP6297329A | ||||
| JP6337193B2 |
Attorney, Agent or Firm:
Ishido