Title:
【発明の名称】電子ビーム照射装置
Document Type and Number:
Japanese Patent JP2000516382
Kind Code:
A
Abstract:
PCT No. PCT/JP97/02775 Sec. 371 Date Feb. 11, 1999 Sec. 102(e) Date Feb. 11, 1999 PCT Filed Aug. 8, 1997 PCT Pub. No. WO98/07175 PCT Pub. Date Feb. 19, 1998An electron beam irradiation apparatus. The apparatus allows an electron beam which is generated in a vacuum container to pass through a window foil that separates the vacuum container from a process vessel. The beam irradiates gas containing moisture to thereby process the gas. The apparatus includes the vacuum container, the process vessel and the window foil. The window foil has a surface for contacting the wet gas and is made of titanium or an alloy containing titanium as its main component. The surface of the window foil is coated with one of the platinum metals such as palladium.
Inventors:
Masahiro Izutsu
Naoaki Kogure
Naoaki Kogure
Application Number:
JP50958598A
Publication Date:
December 05, 2000
Filing Date:
August 08, 1997
Export Citation:
Assignee:
Ebara Corporation
International Classes:
G21K5/00; H01J5/18; H01J33/04; (IPC1-7): H01J33/04; H01J5/18
Attorney, Agent or Firm:
Isamu Watanabe (2 outside)