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Title:
【発明の名称】排気方法
Document Type and Number:
Japanese Patent JPS5936382
Kind Code:
B2
Inventors:
KUBOTA YOSHUKI
YAMASHITA TOSHIMITSU
SAITO KOJI
Application Number:
JP4392377A
Publication Date:
September 03, 1984
Filing Date:
April 15, 1977
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01J9/385; F04B37/16; H01J7/16; (IPC1-7): H01J9/385
Attorney, Agent or Firm:
Toshio Nakao



 
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