Title:
【発明の名称】露光方法
Document Type and Number:
Japanese Patent JP2682295
Kind Code:
B2
Inventors:
Satoshi Akutagawa
Application Number:
JP24091391A
Publication Date:
November 26, 1997
Filing Date:
September 20, 1991
Export Citation:
Assignee:
富士通株式会社
International Classes:
G03F7/20; H01L21/027; H01L21/30; (IPC1-7): H01L21/027; G03F7/20
Domestic Patent References:
| JP59144125A |
Attorney, Agent or Firm:
Teiichi