Title:
【発明の名称】露光方法
Document Type and Number:
Japanese Patent JP2972528
Kind Code:
B2
Inventors:
YASUSATO TADAO
ISHIDA SHINJI
IWABUCHI YOKO
ISHIDA SHINJI
IWABUCHI YOKO
Application Number:
JP24910894A
Publication Date:
November 08, 1999
Filing Date:
October 14, 1994
Export Citation:
Assignee:
NIPPON DENKI KK
International Classes:
G01J9/00; G01M11/00; G03F1/32; G03F1/68; H01L21/027; (IPC1-7): H01L21/027; G01J9/00; G01M11/00; G03F1/08
Domestic Patent References:
| JP6332152A | ||||
| JP6289594A | ||||
| JP4190352A | ||||
| JP4230752A | ||||
| JP5265186A | ||||
| JP63803A |
Attorney, Agent or Firm:
Naoki Kyomoto (2 outside)