Title:
【発明の名称】熱処理装置
Document Type and Number:
Japanese Patent JP2668023
Kind Code:
B2
Inventors:
Junichi Kakizaki
Application Number:
JP2567290A
Publication Date:
October 27, 1997
Filing Date:
February 05, 1990
Export Citation:
Assignee:
東京エレクトロン株式会社
International Classes:
H01L21/22; B01D5/00; C23C16/44; C23C16/455; F27B17/00; H01L21/31; (IPC1-7): H01L21/22; B01D5/00; C23C16/44; F27B17/00; H01L21/31
Domestic Patent References:
| JP59196800U | ||||
| JP238468U |
Attorney, Agent or Firm:
Noriyuki Kanasaka