Title:
【発明の名称】サスセプターとして有用な高純度複合体及び結晶成長法
Document Type and Number:
Japanese Patent JP3454516
Kind Code:
B2
Abstract:
A Czochralski process furnace component comprises a high purity, semiconductor standard composite including a carbon fiber reinforced carbon matrix having a total level of metal impurity below about 10 ppm, preferably below about 5 ppm, and most preferably having a level of metal impurity below the detection limit of inductively coupled plasma spectroscopy for the metals Ag, Al, Ba, Be, Ca, Cd, Co, Cr, Cu, K, Mg, Mn, Mo, Na, Ni, P, Pb, Sr and Zn. A crucible susceptor for a crystal growing process for pulling a crystal ingot from a crystal material melt in a crucible comprises a high purity composite comprising a two dimensional, continuously woven carbon fiber fabric reinforced carbon matrix; the high purity composite having a total level of metal impurity less than about 10 parts per million; the crucible susceptor being a one piece, ply lay-up structure of said high purity composite, having a side ring and a base, said side ring and said base having substantially the same thickness.
Inventors:
Metter Robert Howard
Hearthcock Joseph David
Wintsek Peter M
Hearthcock Joseph David
Wintsek Peter M
Application Number:
JP50241899A
Publication Date:
October 06, 2003
Filing Date:
May 08, 1998
Export Citation:
Assignee:
Hightco Carbon Composits, Inc.
International Classes:
C04B35/83; C30B15/00; B32B9/00; C30B15/10; C30B15/14; C30B35/00; D01F11/12; (IPC1-7): C30B15/10
Domestic Patent References:
| JP1264964A | ||||
| JP789789A | ||||
| JP10130067A | ||||
| JP10218697A | ||||
| JP10273369A | ||||
| JP637174U |
Other References:
【文献】米国特許5132145(US,A)
【文献】米国特許3462289(US,A)
【文献】米国特許3174895(US,A)
【文献】米国特許3462289(US,A)
【文献】米国特許3174895(US,A)
Attorney, Agent or Firm:
Minoru Nakamura (9 outside)