Title:
【発明の名称】インダクタンス形変位センサ装置
Document Type and Number:
Japanese Patent JP2641485
Kind Code:
B2
Inventors:
SHIRAO JUJI
Application Number:
JP7186888A
Publication Date:
August 13, 1997
Filing Date:
March 28, 1988
Export Citation:
Assignee:
EBARA SOGO KENKYUSHO KK
International Classes:
G01B7/14; G01B7/00; G01D5/20; (IPC1-7): G01B7/00; G01B7/14
Domestic Patent References:
| JP63272537A | ||||
| JP6025488A | ||||
| JP5455463A | ||||
| JP60179803U |
Attorney, Agent or Firm:
Toshitada Takahashi (1 outside)