PURPOSE: To obtain a refined gas contg. a prescribed concn. of an intended gaseous component by detecting the component concn. of the intended gas in a formed gas and regulating and operating means for regulating the removal rate of gas according to the value thereof.
CONSTITUTION: The concn. of the intended gaseous component in the formed gas produced with an arbitrary device is detected with a detector 12, and the value thereof is compared with a preset target value in a comparator 13. In accordance with the comparison signal, a controller 15 emits a control signal and regulates the removal rate for the specific component gas by controlling a compressor 2, a supply pump 8 for absorbing liq., a control valve 16 for raw material gas and a sprayer 18. The concn. of the specific intended gaseous component in the formed gas is controlled to an intended value in the above-mentioned way.
WATANABE SHIYOUJI
YAHAGI TOSHIO
OOTANI KOUJI
MORI SHIYUNJI
OGASAWARA HITOSHI
JPS5129996A | 1976-03-13 | |||
JPS5383983A | 1978-07-24 | |||
JPS5665690A | 1981-06-03 |