Title:
【発明の名称】積層薄膜体及びその製造法
Document Type and Number:
Japanese Patent JP2767298
Kind Code:
B2
Abstract:
A laminated film comprising at least two thin films of single crystal LnBa2Cu3O7-x wherein Ln is Y or one of lanthanoids except Pr and Tb having the (001) plane in the direction parallel with the film surface and at least one continuous thin film of Y2O3 which is has the (001) plane in the direction parallel with the film surface and is interposed between a pair of said thin films of single crystal LnBa2Cu3O7-x, wherein the thin films of single crystal LnBa2Cu3O7-x has good superconductive properties.
Inventors:
TAKADA TOSHIO
TERAJIMA TAKAHITO
IIJIMA KENJI
YAMAMOTO KAZUTSURA
HIRATA KAZUTO
BANDO HISANORI
TERAJIMA TAKAHITO
IIJIMA KENJI
YAMAMOTO KAZUTSURA
HIRATA KAZUTO
BANDO HISANORI
Application Number:
JP22988489A
Publication Date:
June 18, 1998
Filing Date:
September 05, 1989
Export Citation:
Assignee:
SEISAN KAIHATSU KAGAKU KENKYUSHO
International Classes:
C30B23/02; C01G1/00; C01G3/00; C23C14/08; C30B29/16; C30B29/22; H01L39/14; H01L39/22; H01L39/24; (IPC1-7): C01G3/00; C01G1/00; C23C14/08; C30B29/22; H01L39/24
Domestic Patent References:
| JP643917A | ||||
| JP63283086A |
Attorney, Agent or Firm:
Junichi Ando