Title:
【発明の名称】レーザアニール装置
Document Type and Number:
Japanese Patent JP2815025
Kind Code:
B2
Inventors:
Yoshihiro Takao
Application Number:
JP31074789A
Publication Date:
October 27, 1998
Filing Date:
December 01, 1989
Export Citation:
Assignee:
富士通株式会社
International Classes:
H01L21/20; H01L21/268; (IPC1-7): H01L21/268; H01L21/20
Attorney, Agent or Firm:
Aoki Akira (3 outside)