Title:
【発明の名称】遮光膜とその製造方法
Document Type and Number:
Japanese Patent JP2774105
Kind Code:
B2
Inventors:
Hirama
Tatsuo Ishibashi
Tatsuo Ishibashi
Application Number:
JP13221188A
Publication Date:
July 09, 1998
Filing Date:
May 30, 1988
Export Citation:
Assignee:
NISSHA PRINTING CO.,LTD.
International Classes:
C23C18/08; C23C18/12; C23C18/16; C23C18/31; C23C18/42; C23C18/44; C23C18/52; G02F1/133; G02F1/1335; G03F1/00; G09F9/00; (IPC1-7): C23C18/12; C23C18/44; G03F1/00; G09F9/00
Domestic Patent References:
| JP57207253A | ||||
| JP643256B1 |