PURPOSE: To efficiently obtain high-purity methacryloyloxypropyldimethylchloro silane useful as an end blocking agent for a methacryloyloxy functional silicone macromer, forming a small amount of impurities, by reducing water content of allyl methacrylate as a starting raw material as little as possible.

CONSTITUTION: This compound is obtained by subjecting (A) allyl methacrylate having ≤200ppm, preferably ≥180ppm water content and (B) dimethylchlorosilane to addition reaction in the presence of a catalyst for hydroxylation reaction (preferably a platinum-based catalyst such as a solution of chloroplatinic acid in an alcohol) preferably at 40-80°C. The ratio of the number of mols of the component A to the component B is preferably 1.1-2:1. A polymerization inhibitor is added to the reaction system in order to prevent polymerization reaction of methacryloyloxypropyl group occurring as side reaction. Adjustment of water content in the component A is preferably carried out by a method of azeotropic dehydration for heating the component with an organic solvent such as n-hexane immiscible with water.