Title:
【発明の名称】電子部品の製造方法
Document Type and Number:
Japanese Patent JP2537301
Kind Code:
B2
Inventors:
TEJIMA KOICHI
YAMADA MASAKAZU
SAKURAI HISAHARU
ABE TAKEYUMI
YAMADA MASAKAZU
SAKURAI HISAHARU
ABE TAKEYUMI
Application Number:
JP22791190A
Publication Date:
September 25, 1996
Filing Date:
August 31, 1990
Export Citation:
Assignee:
TOKYO SHIBAURA ELECTRIC CO
International Classes:
C22F1/08; C22F1/00; H01L23/50; (IPC1-7): C22F1/08; H01L23/50
Domestic Patent References:
| JP54100257A | ||||
| JP51115775A | ||||
| JP54126467A | ||||
| JP5613450A | ||||
| JP5220404B1 | ||||
| JP5342390B2 | ||||
| JP5143721Y2 |
Other References:
【文献】米国特許3717511(US,A)
Attorney, Agent or Firm:
Noriyuki Noriyuki (1 person outside)