PURPOSE: To obtain a sensor suitable for measurement of speed or temperature in which the accuracy and high speed response are enhanced at low cost while simplifying the structure significantly.

CONSTITUTION: The sensor 10 comprises a film substrate 11, a sensor part (thin metal film resistor) 12 formed on the film substrate 11, and a protective film covering the sensor part 12. The sensor part 12 is provided with a current introduction terminal 17, and a voltage detection terminal 18 wherein the thermal capacity at the sensor part 12 is minimized through a laminate of the film substrate 11, the sensor part 12, and the protective film thus ensuring the high speed response. Heat is removed from the sensor part 12 by passing a fluid, e.g. the air, through many small holes (14,...) and the variation of electric resistance is detected based on the voltage.