Title:
【発明の名称】酸化物薄膜の作製方法
Document Type and Number:
Japanese Patent JP2648211
Kind Code:
B2
Inventors:
UEI KUNIHIKO
Application Number:
JP20744889A
Publication Date:
August 27, 1997
Filing Date:
August 10, 1989
Export Citation:
Assignee:
NIPPON DENSHIN DENWA KK
International Classes:
C30B29/22; C23C16/40; C23C16/44; C23C16/448; (IPC1-7): C23C16/40; C23C16/44; C30B29/22
Domestic Patent References:
| JP63319038A | ||||
| JP2194178A | ||||
| JP215173A |
Attorney, Agent or Firm:
Takashi Sawai