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Title:
【発明の名称】SOIウエハの製造方法
Document Type and Number:
Japanese Patent JP2579494
Kind Code:
B2
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Inventors:
NAKAMURA SHUNJI
Application Number:
JP21524687A
Publication Date:
February 05, 1997
Filing Date:
August 31, 1987
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
H01L21/20; H01L21/02; H01L21/336; H01L21/76; H01L21/762; H01L21/84; H01L27/12; H01L29/78; H01L29/786; (IPC1-7): H01L27/12; H01L21/20; H01L21/336; H01L21/762; H01L29/786
Domestic Patent References:
JP5252582A
JP62188373A
Attorney, Agent or Firm:
Shoji Kashiwaya (1 person outside)



 
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