Title:
【発明の名称】立方晶窒化ほう素の製造方法
Document Type and Number:
Japanese Patent JP2615190
Kind Code:
B2
More Like This:
Inventors:
Kodama Katsu
Kei Notomi
Kei Notomi
Application Number:
JP5978489A
Publication Date:
May 28, 1997
Filing Date:
March 14, 1989
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES,LTD.
International Classes:
C01B21/064; C23C16/34; C23C16/38; C23C16/50; (IPC1-7): C23C16/34; C23C16/38; C23C16/50
Domestic Patent References:
| JP63128179A | ||||
| JP6395200A |
Attorney, Agent or Firm:
Akira Uchida (2 outside)