Title:
【発明の名称】マイクロメカニカルマニピュレータ
Document Type and Number:
Japanese Patent JP2722010
Kind Code:
B2
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| JP3721969 | STAGE DEVICE |
Inventors:
BENETSUKE BORUFUGANGU
Application Number:
JP50049990A
Publication Date:
March 04, 1998
Filing Date:
December 06, 1989
Export Citation:
Assignee:
FURAUNHOOFUAA G TSUA FUORUDERUNGU DEA ANGEUANTEN FUORUSHUNGU EE FUAU
International Classes:
B23Q1/36; B25J7/00; B81B3/00; F03G7/06; F15C5/00; F16H25/02; F16K99/00; G02B7/182; H01H1/00; H01H37/52; H02N10/00; H01H61/04; (IPC1-7): B25J7/00; F03G7/06; H01H37/52; H02N10/00
Domestic Patent References:
| JP5973826A | ||||
| JP5867976A | ||||
| JP6079181A | ||||
| JP6170175A |
Attorney, Agent or Firm:
Fumio Sasashima