Title:
【発明の名称】マイクロメカニカルメモリーセンサー
Document Type and Number:
Japanese Patent JPH10504894
Kind Code:
A
Abstract:
A micromechanical memory sensor. The sensor comprises a latch member mechanically latching upon detection of a threshold value of a variable condition and circuitry for detecting such latching. A sensor further includes a resetting mechanism for electrically unlatching the latch member whereby the sensor latched purely mechanically is electrically reset for repeat use.
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Inventors:
Meergany, Meeran
Goldman, Kenneth Gee.
Dürer, Vijayakmar Earl.
Goldman, Kenneth Gee.
Dürer, Vijayakmar Earl.
Application Number:
JP50234796A
Publication Date:
May 12, 1998
Filing Date:
June 09, 1995
Export Citation:
Assignee:
CASE WESTERN RESERVE UNIVERSITY
International Classes:
G01L1/18; B81B3/00; G01D9/18; G01D15/00; G01K5/60; G01P15/08; H01L29/84; H01H1/00; H01H35/14; H01H35/34; H01H37/52; H01H37/74; H01H61/02; H01H9/00; (IPC1-7): G01D9/18; G01D15/00; G01K5/60; G01L1/18; H01L29/84
Attorney, Agent or Firm:
Kawakita Takecho