【発明の名称】マイクロ波熱プラズマ・ト―チ

Title:

【発明の名称】マイクロ波熱プラズマ・ト―チ

Document Type and Number:

Japanese Patent JP2527150

Kind Code:

B2

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Inventors:

Yoshinobu Yoshida
Yoshitaka Mitsuda
Kazuo Akashi

Application Number:

JP19237289A

Publication Date:

August 21, 1996

Filing Date:

July 25, 1989

Export Citation:

Assignee:

Yoshinobu Yoshida
Nippon High Frequency Co., Ltd.
Nichimen Corporation

International Classes:

H05H1/30; B01J19/08; C30B29/04; (IPC1-7): H05H1/30

Attorney, Agent or Firm:

Naoto Kan (1 person outside)

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