Title:
【発明の名称】レーザー走査システムのミラー
Document Type and Number:
Japanese Patent JP2002530694
Kind Code:
A
Abstract:
A non-symmetrical scanning mirror for a laser scanning system is stiffer at a bottom end than at a top end. The mirror, which is driven from the bottom end, has a relatively high resonant frequency and can thus accelerate quickly and smoothly. The mirror may be wider or thicker at the bottom end or it may be made stiffer by attaching stiffeners to the bottom end.
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Inventors:
Stackers, felix
Application Number:
JP2000582841A
Publication Date:
September 17, 2002
Filing Date:
November 15, 1999
Export Citation:
Assignee:
GENERAL SCANNING INCORPORATED
International Classes:
G02B5/08; B23K26/06; G02B7/182; G02B26/10; H01L21/027; (IPC1-7): G02B26/10; B23K26/06; G02B5/08; H01L21/027
Attorney, Agent or Firm:
Kaoru Furuya (2 outside)