Title:
【発明の名称】複数液混合装置
Document Type and Number:
Japanese Patent JPH0741153
Kind Code:
B2
Abstract:
PURPOSE:To prepare mixed liquid in a short period of time while maintaining the accurate mixing ratio by alternating the feeding order from respective liquid feeding source to a graduate before or every time the mixed liquid weighed respectively by a weighing machine is transferred to a preservation container. CONSTITUTION:First, the total weight of good solvent and a load solvent to be supplied to a graduate 21 is set, and then the mixing ratio and the number of repeating respective feeding are decided. Under said condition, before or every time the liquid is moved to a preservation container 41 through an on-off valve 27, respective liquid feeding sourrces 1 and 2 to the graduate 21 is controlled to be replaced alternatively. As a result, before being transferred to the preservation container 41, the mixed liquid is preliminarily mixed in the graduate 21. When said tow liquids are transferred to the preservation container 41, therefore, the mixing time of two liquids in an agitator 43 can be shortened, and a developing liquid can be prepared quickly.
Inventors:
Toshitaka Takei
Minoru Tanaka
Minoru Tanaka
Application Number:
JP9289187A
Publication Date:
May 10, 1995
Filing Date:
April 15, 1987
Export Citation:
Assignee:
Daikin Industries, Ltd.
International Classes:
B01F15/04; B01F13/10; G05D11/00; G05D11/02; G05D11/04; H01L21/027; H01L21/30; (IPC1-7): B01F15/04
Domestic Patent References:
| JP59142832A |
Attorney, Agent or Firm:
Masahiro Nishimori
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