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Patent Searching and Data


Title:
SEMICONDUCTOR MEMORY DEVICE
Document Type and Number:
Japanese Patent JPS6053072
Kind Code:
A
Abstract:

PURPOSE: To keep the non-conductive state of a parasitic transistor under a field oxide film positively, and to prevent the interference of informations between adjacent storage capacitance by applying negative potential to a polycrystalline silicon film as a first electrode for storage capacitance.

CONSTITUTION: The negative potential of a power supply 14 is connected to a polycrystalline silicon film 9 as a first electrode 2 for storage capacitance 1. Consequently, a small number of carriers under a field oxide film 12 between adjacent storage capacitance 1 and 1a are removed by applying negative potential to the polycrystalline silicon film 9 on the field oxide film 12, a large number of carriers are induced, and possibility of which a channel for a parasitic transistor is converted into an N type and brought to a conductive state can be prevented. Accordingly, a dRAM having excellent charge holding characteristics of storage capacitance and high reliability can be obtained easily.


Inventors:
MASUKO KOUICHIROU
Application Number:
JP16212283A
Publication Date:
March 26, 1985
Filing Date:
September 01, 1983
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
G11C11/401; H01L21/8242; H01L27/10; H01L27/108; H01L29/78; (IPC1-7): G11C11/34; H01L27/10; H01L29/78
Attorney, Agent or Firm:
Masuo Oiwa