Title:
【発明の名称】光干渉式位置計測装置
Document Type and Number:
Japanese Patent JP3344637
Kind Code:
B2
Abstract:
PURPOSE: To provide a light interference type position measuring apparatus which can detect an absolute position of an object to be measured simply. CONSTITUTION: The wavelength of a luminous flux OL emitted from a light source 21 is changed. Increment and decrement values Cx and Co of the wave numbers of a measured length Lx and a reference length Lo caused by this change of the wavelength are detected. A position data detecting section 25 calculates the measured length Lx by Lx=Lo (Cx/Co) based on the increment and decrement values Cx and Co of the wave number and the reference length Lo.
Inventors:
Masayuki Nashiki
Atsushi Ieki
Atsushi Ieki
Application Number:
JP30227994A
Publication Date:
November 11, 2002
Filing Date:
December 06, 1994
Export Citation:
Assignee:
Okuma Corporation
International Classes:
G01B9/02; B23Q17/24; G01B11/00; G01J9/00; (IPC1-7): G01B9/02; G01B11/00
Domestic Patent References:
| JP4324304A | ||||
| JP3269302A | ||||
| JP6435304A | ||||
| JP59218903A |
Attorney, Agent or Firm:
Kenji Yoshida (2 outside)