Title:
【発明の名称】光学的パタ-ンマッチング方法
Document Type and Number:
Japanese Patent JP3107591
Kind Code:
B2
Abstract:
PURPOSE:To execute the pattern matching of lots of reference patterns with the pattern to be inspected in parallel and to correspond it to input information being intrinsically ambiguous by a simple optical system. CONSTITUTION:A luminous flux 20 outgoing from a laser beam is divided into two by a beam splitter 11, a reference pattern group where the attribute degree is expressed as transmissivity or reflectivity and the pattern to be inspected are drawn on different space optical modulators 31 and 32, difference between picture elements having the corresponding attribute between the respective reference patterns and the pattern to be inspected is optically operated and light quantity corresponding to a value which is the second power of the operation result of obtained difference is received in a two dimensional light quantity converting element 17 so as to be transmitted to a computer 18. The computer 18 comparison-calculates the sum of light quantity corresponding to all the picture elements in the respective reference patterns with a set threshold and, furthermore, the degree of non-linear processed result belongs to the respective reference patterns which the pattern to be inspected has.
Inventors:
Toshiharu Takei
Hideki Yamazaki
Hideki Yamazaki
Application Number:
JP13111691A
Publication Date:
November 13, 2000
Filing Date:
June 03, 1991
Export Citation:
Assignee:
Sumitomo Osaka Cement Co., Ltd.
Seiko Instruments Inc.
Seiko Instruments Inc.
International Classes:
G06E3/00; G06T7/00; G02B27/46; (IPC1-7): G06T7/00; G02B27/46; G06E3/00
Domestic Patent References:
| JP331973A | ||||
| JP218529A | ||||
| JP2293985A | ||||
| JP2146518A | ||||
| JP272336A |
Other References:
”Ｎｏｎｌｉｎｅａｒ ｏｐｔｉｃａｌ ｉｍａｇｅ ｓｕｂｔｒａｃｔｉｏｎ ｆｏｒ ｐｏｔｅｎｔｉａｌ ｉｎｄｕｓｔｒｉａｌ ａｐｐｌｉｃａｔｉｏｎｓ”，ＯＰＴＩＣＡＬ ＥＮＧＩＮＥＥＲＩＮＧ（１９８８）Ｖｏｌ．２７ Ｎｏ．５ ｐｐ３８５−３９２
Attorney, Agent or Firm:
Yutaka Kuramochi