Title:
【発明の名称】部分めっき装置
Document Type and Number:
Japanese Patent JP2666415
Kind Code:
B2
Inventors:
Takahiro Kawabe
Application Number:
JP26176888A
Publication Date:
October 22, 1997
Filing Date:
October 18, 1988
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
C25D5/02; H01L23/50; (IPC1-7): C25D5/02; H01L23/50
Domestic Patent References:
| JP63145791A | ||||
| JP62238390A | ||||
| JP5735362U |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)