PURPOSE: To facilitate the holding and carrying in and out of a large-size object to be subjected to vapor deposition in a vacuum vessel.
CONSTITUTION: In a vacuum vessel 1, an upper boat 5 having a heating vessel 7 heating and melting a vapor deposition material M inside by electrification and emitting evaporated grains upward is disposed in the position above a substrate 2. A reflecting boat 6, covering a wide range above the upper boat 5, is arranged in the position above this upper boat 5. This apparatus is constituted so that the reflecting boat 6 can be heated up to a temp. equal to that of the heating vessel 7 by applying electrification to the reflecting boat 6. By this method, a thin film can be formed on the surface of the object to be subjected to vapor deposition.
ARAI HIROSHIGE
INOUE TETSUYA
MAEHATA HIDEHIKO
SUZUKI MOTOMITSU
