Title:
【発明の名称】光開始剤組成物
Document Type and Number:
Japanese Patent JP2660108
Kind Code:
B2
Inventors:
TOBA YASUMASA
YASUIKE MADOKA
YAMAGUCHI TAKEO
YASUIKE MADOKA
YAMAGUCHI TAKEO
Application Number:
JP1947891A
Publication Date:
October 08, 1997
Filing Date:
January 18, 1991
Export Citation:
Assignee:
TOYO INKI SEIZO KK
International Classes:
G03C1/675; G03C1/735; G03F7/004; G03F7/027; G03F7/029; G03F7/031; H01L21/027; H01L21/30; (IPC1-7): G03F7/029; G03F7/004; G03F7/027; G03F7/031; H01L21/027
Domestic Patent References:
| JP2135351A | ||||
| JP2972A | ||||
| JP61278506A | ||||
| JP6078442A | ||||
| JP5083103A | ||||
| JP4113361A |