Title:
【発明の名称】圧電体の研磨制御装置
Document Type and Number:
Japanese Patent JP2717872
Kind Code:
B2
Inventors:
Tabata Makoto
Hiroshi Takezawa
Hiroshi Takezawa
Application Number:
JP5045290A
Publication Date:
February 25, 1998
Filing Date:
February 28, 1990
Export Citation:
Assignee:
Nippon Denpa Industry Co., Ltd.
International Classes:
G01B7/06; B23Q17/09; B24B37/013; B24B37/07; B24B49/00; G01B17/02; H03H3/04; (IPC1-7): B24B49/00; B23Q17/09; B24B37/04; G01B7/06; G01B17/02; H03H3/04
Domestic Patent References:
| JP5554174A | ||||
| JP2224969A |