【発明の名称】プラズマCVD装置 - MITSUBISHI HEAVY INDUSTRIES,LTD.

Title:

【発明の名称】プラズマCVD装置

Document Type and Number:

Japanese Patent JP3068604

Kind Code:

B2

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Inventors:

Masayoshi Murata
Yoshiaki Takeuchi
Akira Serizawa
Yoshikazu Nawata
Kazuhiko Ogawa
Hiroshi Mashima
Hirohisa Yoshida

Application Number:

JP9459899A

Publication Date:

July 24, 2000

Filing Date:

April 01, 1999

Export Citation:

Assignee:

MITSUBISHI HEAVY INDUSTRIES,LTD.

International Classes:

H01L21/205; C23C16/50; C23C16/505; H01L21/31; H05H1/46; (IPC1-7): H01L21/205; C23C16/50; H01L21/31; H05H1/46

Domestic Patent References:

Attorney, Agent or Firm:

Toshiro Mitsuishi (2 outside)

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