Title:
【発明の名称】アルミニウム合金膜のプラズマエッチング方法
Document Type and Number:
Japanese Patent JP2753103
Kind Code:
B2
Inventors:
DOMAE SHINICHI
Application Number:
JP7378890A
Publication Date:
May 18, 1998
Filing Date:
March 23, 1990
Export Citation:
Assignee:
MATSUSHITA DENSHI KOGYO KK
International Classes:
C23F4/00; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; C23F4/00
Domestic Patent References:
| JP58111321A | ||||
| JP5629328A | ||||
| JP2244623A | ||||
| JP3177587A |
Attorney, Agent or Firm:
Tomoyuki Takimoto (1 person outside)