Title:
【発明の名称】位置調整装置
Document Type and Number:
Japanese Patent JP2845582
Kind Code:
B2
Inventors:
YAMAGA KENICHI
JOSADA TADAYUKI
JOSADA TADAYUKI
Application Number:
JP17718390A
Publication Date:
January 13, 1999
Filing Date:
July 04, 1990
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
F27B17/00; F27B5/06; H01L21/205; H01L21/22; H01L21/31; H01L21/68; (IPC1-7): H01L21/22; H01L21/205; H01L21/31
Domestic Patent References:
| JP1149474U |
Attorney, Agent or Firm:
Moriya Kazuo