【発明の名称】位置検出装置

Title:

【発明の名称】位置検出装置

Document Type and Number:

Japanese Patent JP2547333

Kind Code:

B2

Inventors:

KAWAKAMI EIGO
KAWASE TOSHIMITSU
YOSHII MINORU
SAITO KENJI

Application Number:

JP30574787A

Publication Date:

October 23, 1996

Filing Date:

December 04, 1987

Export Citation:

Assignee:

CANON KK

International Classes:

G01B7/00; G01D5/244; G01D5/245; G01N37/00; G01Q60/10; (IPC1-7): G01D5/245; G01B7/00; G01D5/245

Domestic Patent References:

JP1147318A

Attorney, Agent or Firm:

Tetsuya Ito (1 outside)

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