Title:
【発明の名称】プローブ装置
Document Type and Number:
Japanese Patent JP2879282
Kind Code:
B2
Inventors:
NAGASAWA YASUSHI
Application Number:
JP26954692A
Publication Date:
April 05, 1999
Filing Date:
September 11, 1992
Export Citation:
Assignee:
TOKYO EREKUTORON KK
International Classes:
G01R1/073; H01L21/66; (IPC1-7): H01L21/66; G01R1/073
Domestic Patent References:
| JP4326540A | ||||
| JP58189531U | ||||
| JP62168472U |
Attorney, Agent or Firm:
Toshio Inoue