Title:
【発明の名称】投影露光方法
Document Type and Number:
Japanese Patent JP2667965
Kind Code:
B2
Inventors:
Kawashima Haruna
Suzuki Akiyoshi
Suzuki Akiyoshi
Application Number:
JP19318995A
Publication Date:
October 27, 1997
Filing Date:
July 28, 1995
Export Citation:
Assignee:
Canon Inc
International Classes:
G03F7/207; G03F9/00; G03F9/02; H01L21/027; (IPC1-7): H01L21/027; G03F9/02
Domestic Patent References:
| JP57212406A | ||||
| JP6119129A | ||||
| JP61152013A | ||||
| JP61183928A | ||||
| JP5893233A | ||||
| JP6355430U |
Attorney, Agent or Firm:
Marushima Giichi