Title:
【発明の名称】定量気化供給装置
Document Type and Number:
Japanese Patent JPH0671551
Kind Code:
B2
Inventors:
Yokoyama Hidechika
Application Number:
JP13433692A
Publication Date:
September 14, 1994
Filing Date:
April 28, 1992
Export Citation:
Assignee:
Soken Industry Co., Ltd.
International Classes:
B01J4/02; B01J7/00; B01J7/02; G05D7/06; G05D11/13; (IPC1-7): B01J7/02; B01J4/02; G05D7/06; G05D11/13
Domestic Patent References:
| JP2268826A |
Attorney, Agent or Firm:
Koichi Nagata
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