Title:
【発明の名称】剥離剤組成物
Document Type and Number:
Japanese Patent JPH0612455
Kind Code:
B2
Inventors:
SUGITA MASARU
Application Number:
JP17666285A
Publication Date:
February 16, 1994
Filing Date:
August 10, 1985
Export Citation:
Assignee:
NAGASE & CO LTD
International Classes:
H01L21/30; G03C11/00; G03F7/00; G03F7/42; H01L21/027; (IPC1-7): G03F7/42; H01L21/027
Domestic Patent References:
| JP6026945A | ||||
| JP57165834A |
Attorney, Agent or Firm:
Makino Itsuro
Next Patent: NON-SIGNAL DETECTION SYSTEM