Title:
【発明の名称】レジスト膜除去装置
Document Type and Number:
Japanese Patent JP2681360
Kind Code:
B2
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Inventors:
Keisuke Shinagawa
Hiroshi Yano
Hiroshi Yano
Application Number:
JP1597788A
Publication Date:
November 26, 1997
Filing Date:
January 28, 1988
Export Citation:
Assignee:
富士通株式会社
International Classes:
G03F7/42; G03C11/00; G03F7/00; G03F7/30; G03F7/36; H01L21/027; H01L21/30; H01L21/302; H01L21/3065; (IPC1-7): H01L21/3065; G03F7/36; H01L21/027
Domestic Patent References:
| JP5685827A | ||||
| JP62272538A |
Attorney, Agent or Firm:
Seiichi Samukawa