Title:
【発明の名称】巻取式真空蒸着装置
Document Type and Number:
Japanese Patent JP2916237
Kind Code:
B2
Inventors:
ODA MINORU
KOIZUMI YOSHITERU
KOIZUMI YOSHITERU
Application Number:
JP27620790A
Publication Date:
July 05, 1999
Filing Date:
October 17, 1990
Export Citation:
Assignee:
NIPPON SHINKU GIJUTSU KK
AIHARA KK
AIHARA KK
International Classes:
C23C14/50; C23C14/56; F25D17/02; (IPC1-7): C23C14/56; F25D17/02
Domestic Patent References:
| JP195271A | ||||
| JP195270A | ||||
| JP195269A | ||||
| JP35685A | ||||
| JP6134511B2 |
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)